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Dry Etch Technology

Dry Etch Technology 9-10-September 1991, San Jose, California - Proceedings / SPIE--the International Society for Optical Engineering

Book (01 Jan 1992)

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Book information

ISBN: 9780819407245
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.38152
DEWEY edition: 20
Language: English
Number of pages: 222
Weight: 544g
Height: 279mm
Width: 222mm
Spine width: 12mm