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Diffusion Phenomena in Thin Films and Microelectronic Materials

Diffusion Phenomena in Thin Films and Microelectronic Materials - Materials Science and Process Technology Series

Book (01 Dec 1988)

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Publisher's Synopsis

A comprehensive review of diffusion phenomena in thin films and microelectronic materials - theory and technology. Contents include: Bulk Solids and Thin Films Anelastic Relaxation and Diffusion in Thin-Layer Materials Diffusion in Artificially Modulated Thin Films Diffusion and Growth in Oxide Films Diffusion Induced Grain Boundary Migration in Thin Films Effects of Ambients on Thin Film Interactions Electromigration in Metallic Thin Films Diffusion Barriers in Semiconductor Contract Metallization Thermal Stability of Lead-Alloy Josephson Junctions Diffusion and Electromigration of Impurities in Lead Solders.

Book information

ISBN: 9780815511670
Publisher: Noyes Publications
Imprint: Noyes Publications
Pub date:
DEWEY: 621.3817
DEWEY edition: 19
Language: English
Number of pages: 588
Weight: 1202g
Height: 230mm
Width: 150mm