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Device and Process Technologies for MEMS and Microelectronics II

Device and Process Technologies for MEMS and Microelectronics II 17-19 December, 2001, Adelaide, Australia - SPIE Proceedings Series

Book (01 Jan 2001)

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Book information

ISBN: 9780819443229
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381
DEWEY edition: 22
Language: English
Number of pages: 538
Weight: -1g