Publisher's Synopsis
Excerpt from Correction Factor Tables for Four-Point Probe Resistivity Measurements on Thin, Circular Semiconductor Samples
When measuring the resistivity of a thin, circular sample of semiconductor material, a four-point probe is often used. T i probe may be either the in - line arra as described by Valdes 1 or the square array as described by uhlirezfi. By moving the probe over the semiconductfr sample an idea of the sample resistivity variations can be obtained However a geometrical correction factor, which is a function of the position of the probe.on the sample, must be applied for correct results. The tables below give this correction factor for the cases illustrated in figures 1, 2 and 3. These tables apply fx>circularlyshaped'sanples having a uniform thickness which is less than about one - half the probe spacing, and having all surfaces of the sample in contact with an insulating medium. For greater sample thicknesses an additional correction factor, as given by Smits, [4] is necessary; If the sample thickness is less than of the probe Spac ing, the thickness correction is less than If the sample thickness is less than of the probe Spacing, the thickness correc tion factor will be less than The tables are given to six significant figures, all of which would seldom be required, and only those necessary to achieve the desifed accuracy need be used.
About the Publisher
Forgotten Books publishes hundreds of thousands of rare and classic books. Find more at www.forgottenbooks.com
This book is a reproduction of an important historical work. Forgotten Books uses state-of-the-art technology to digitally reconstruct the work, preserving the original format whilst repairing imperfections present in the aged copy. In rare cases, an imperfection in the original, such as a blemish or missing page, may be replicated in our edition. We do, however, repair the vast majority of imperfections successfully; any imperfections that remain are intentionally left to preserve the state of such historical works.
