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Copper Interconnects, New Contact Metallurgies/structures, and Low-K Interlevel Dielectrics

Copper Interconnects, New Contact Metallurgies/structures, and Low-K Interlevel Dielectrics Proceedings of the International Symposium - Proceedings

Book (01 Jan 2001)

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Book information

ISBN: 9781566772945
Publisher: Electrochemical Society
Imprint: Electrochemical Society
Pub date:
DEWEY: 621.3815
DEWEY edition: 22
Language: English
Number of pages: 224