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Copper Interconnects, New Contact Metal- Lurgies, & Low-K Dielectrics

Copper Interconnects, New Contact Metal- Lurgies, & Low-K Dielectrics

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Book information

ISBN: 9781566773799
Publisher: Electrochemical Society,.
Imprint: Electrochemical Society,.
Language: English
Number of pages: 346 p.
Weight: -1g