Hardback (01 Feb 1992)
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Out of stock
This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.
| ISBN: | 9780815512882 |
| Publisher: | Elsevier Science |
| Imprint: | William Andrew |
| Pub date: | 01 Feb 1992 |
| DEWEY: | 621.395 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 235 |
| Weight: | 470g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 15mm |
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