Book (31 Oct 1993)
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This volume is devoted to consideration of the use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. Each chapter treats a type of film used in silicon devices and discusses typical problems seen throughout that film's history, including characterization tools which are most effectively used in clarifying and solving those problems.
| ISBN: | 9780750691727 |
| Publisher: | Butterworth-Heinemann |
| Imprint: | Butterworth-Heinemann |
| Pub date: | 31 Oct 1993 |
| DEWEY: | 620.193 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 240 |
| Weight: | 546g |
| Height: | 229mm |
| Width: | 152mm |
| Spine width: | 19mm |
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