Hardback (01 May 1997)
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Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This text details the deposition methods available for different materials aiming to make the chemistry of deposition accessible to the materials scientist.
| ISBN: | 9783527292943 |
| Publisher: | VCH |
| Imprint: | Wiley-VCH |
| Pub date: | 01 May 1997 |
| DEWEY: | 660.2977 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 338 |
| Weight: | 790g |
| Height: | 246mm |
| Width: | 178mm |
| Spine width: | 21mm |
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