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Advances in Resist Technology and Processing XVIII

Advances in Resist Technology and Processing XVIII 26-28 February, 2001, Santa Clara, [California] USA - SPIE Proceedings Series

Paperback (24 Aug 2001)

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Book information

ISBN: 9780819440310
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 1084
Weight: 1352g