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Advances in Resist Materials and Processing Technology XXIX

Advances in Resist Materials and Processing Technology XXIX 13-15 February 2012, San Jose, California, United States - Proceedings of SPIE

Paperback (30 Jun 2012)

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Publisher's Synopsis

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book information

ISBN: 9780819489814
Publisher: SPIE
Imprint: SPIE
Pub date:
Number of pages: 686
Weight: -1g
Height: 229mm
Width: 152mm