Book (01 Jan 1994)
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Proceedings of the MRS symposium held in San Francisco, April 1994. The volume is divided into nine sections: manufacturability/challenges of interconnections; chem-mechanical polishing/advanced planarization technology; copper interconnection metallization; diffusion barriers/adhesion promoters for copper technology and for aluminum metallization;
| ISBN: | 9781558992375 |
| Publisher: | Materials Research Society |
| Imprint: | Materials Research Society |
| Pub date: | 01 Jan 1994 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 768 |
| Weight: | 1247g |
| Height: | 241mm |
| Width: | 165mm |
| Spine width: | 38mm |
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