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Advanced Gate Stack, Source/drain and Channel Engineering for Si-Based CMOS 3

Advanced Gate Stack, Source/drain and Channel Engineering for Si-Based CMOS 3 New Materials, Processes and Equipment - ECS Transactions

Book (01 Jan 2007)

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Book information

ISBN: 9781566775502
Publisher: Electrochemical Society
Imprint: Electrochemical Society
Pub date:
DEWEY: 621.3815
DEWEY edition: 22
Language: English
Number of pages: 470