Publisher's Synopsis
Microelectromechanical systems, otherwise known as MEMS, are finding uses in a growing range of industries, particularly in the automotive, IT, Internet communications and medical areas. There are an increasing number of MEMS accelerometers and pressure sensors used in cars. Internet communications use tiny mirrors to switch optical signals and lab-on-a-chip MEMS devices carry out complex biochemical analyses that would otherwise require a fully equipped laboratory. Market growth for MEMS has been much faster than for other electronics sensors and is expected to grow rapidly in the future as MEMS are used for new applications, such as in mobile phones, and as current technical issues are resolved.;This report gives a broad introduction to the types of MEMS devices that have been made as commercial products and also those at the prototype stage. It also describes how MEMS devices are designed and fabricated and the technical problems that can occur. Design using mathematical modelling is an essential part of this process and software is available specifically for the design of MEMS. The process steps used to fabricate MEMS are based on those originally developed for the semiconductor industry and the most important processes are described. The choice between MEMS and conventional devices for a new product is the first step to using MEMS. The steps required to use a MEMS device are described, from the original decision to choose the MEMS option, to manufacturing. Design criteria are included with examples of the more common structures that are made and the different actuation mechanisms that can be used. The main materials used are described. Many are based on semiconductors such as silicon wafers, but newer types are using glass or polymers. The most commonly used process steps that are employed in the manufacture of MEMS are described.
