Publisher's Synopsis
This text covers topics including; damage mechanism and modelling; antenna effect and process monitoring; high-K gate dielectric; and integration.
Hardback (30 Jun 2003)
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Out of stock
This text covers topics including; damage mechanism and modelling; antenna effect and process monitoring; high-K gate dielectric; and integration.
ISBN: | 9780780377479 |
Publisher: | IEEE |
Imprint: | IEEE |
Pub date: | 30 Jun 2003 |
DEWEY: | 621.38152 |
DEWEY edition: | 22 |
Language: | English |
Number of pages: | 189 |
Weight: | -1g |