Hardback (31 Aug 2001)
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The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.
| ISBN: | 9780780366886 |
| Publisher: | IEEE |
| Imprint: | IEEE |
| Pub date: | 31 Aug 2001 |
| Language: | English |
| Number of pages: | 67 |
| Weight: | -1g |
| Height: | 230mm |
| Width: | 203mm |
| Spine width: | 6mm |
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