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2001 6th International Symposium on Plasma- And Process-Induced Damage

2001 6th International Symposium on Plasma- And Process-Induced Damage May 13-15, 2001, Monterey, California, USA

Hardback (30 Jun 2001)

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    Publisher's Synopsis

    This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects.

    Book information

    ISBN: 9780965157759
    Publisher: Northern California Chapter of the American Vacuum Society
    Imprint: Northern California Chapter of the American Vacuum Society
    Pub date:
    DEWEY: 621.38152
    DEWEY edition: 21
    Language: English
    Number of pages: 128
    Weight: -1g
    Height: 266mm
    Width: 209mm
    Spine width: 12mm

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