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19th Annual Symposium on Photomask Technology

19th Annual Symposium on Photomask Technology 15-17 September 1999, Monterey, California - SPIE Proceedings Series

Paperback (31 Dec 1999)

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Publisher's Synopsis

These 100 papers, presented at the 19th Annual BACUS Symposium on Photomask Technology and Management, offer information on advances in all areas of the field.

Book information

ISBN: 9780819434685
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 1022
Weight: 2426g
Height: 266mm
Width: 203mm
Spine width: 57mm