Publisher's Synopsis
These 100 papers, presented at the 19th Annual BACUS Symposium on Photomask Technology and Management, offer information on advances in all areas of the field.
Paperback (31 Dec 1999)
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These 100 papers, presented at the 19th Annual BACUS Symposium on Photomask Technology and Management, offer information on advances in all areas of the field.
ISBN: | 9780819434685 |
Publisher: | SPIE |
Imprint: | SPIE |
Pub date: | 31 Dec 1999 |
DEWEY: | 621.381531 |
DEWEY edition: | 21 |
Language: | English |
Number of pages: | 1022 |
Weight: | 2426g |
Height: | 266mm |
Width: | 203mm |
Spine width: | 57mm |