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1998 3rd International Symposium on Plasma Process-Induced Damage

1998 3rd International Symposium on Plasma Process-Induced Damage June 4-5, 1998, Honolulu, Hawaii, USA

Hardback (01 Jan 1998)

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Book information

ISBN: 9780965157728
Publisher: Northern California Chapter of the American Vacuum Society
Imprint: Northern California Chapter of the American Vacuum Society
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 234
Weight: -1g