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1997 2nd International Symposium on Plasma Process-Induced Damage

1997 2nd International Symposium on Plasma Process-Induced Damage 13-14 May 1997, Monterey, California, USA

Hardback (01 Jan 1997)

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Book information

ISBN: 9780965157711
Publisher: Northern California Chapter of the American Vacuum Society
Imprint: Northern California Chapter of the American Vacuum Society
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 259
Weight: -1g