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1996 1st International Symposium on Plasma Process-Induced Damage

1996 1st International Symposium on Plasma Process-Induced Damage 13-14 May 1996, Santa Clara, California, USA

Hardback (01 Jan 1996)

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Book information

ISBN: 9780965157704
Publisher: Northern California Chapter of the American Vacuum Society
Imprint: Northern California Chapter of the American Vacuum Society
Pub date:
DEWEY: 621.38152
DEWEY edition: 20
Language: English
Number of pages: 237
Weight: -1g
Height: 279mm
Width: 222mm
Spine width: 19mm