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16th IEEE Annual Conference on Micro Electro Mechanical Systems (Mems)

16th IEEE Annual Conference on Micro Electro Mechanical Systems (Mems)

CD-ROM (30 Jun 2003)

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    Publisher's Synopsis

    A study of micro electro mechanical systems. The papers that make up the volume constitute the proceedings of the 16th International Micro Electro Mechanical Systems Conference (MEMS), held in 2003. Topics discussed include: nanodevice and NEMS; light and bio manipulation; and fabrication.

    Book information

    ISBN: 9780780377455
    Publisher: I.E.E.E.Press
    Imprint: I.E.E.E.Press
    Pub date:
    DEWEY: 621.381
    Language: English
    Weight: -1g

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